论文部分内容阅读
,Enhanced etching of silicon didioxide guided by carbon nanotubes in HF solution
【作 者】
:
【机 构】
:
State Key Laboratory for Artificial Microstructures and Mesoscopic Physics, School of Physics, Pekin
【出 处】
:
中国物理B(英文版)
【发表日期】
:
2011年10期
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