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Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes(VLEDs).The electrical characteristics of VLEDs with n-type contacts on a roughened and flat N-polar surface have been compared.VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage.Based on this,a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed.Excellent electrical and optical characteristics have been achieved with this method.An aging test further confirmed its stability.
Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). Electrical properties of VLEDs with n-type contacts on a roughened and flat N-polar surface have been.VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage.Based on this, a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed. Excellent electrical and optical characteristics have been achieved with this method.An aging test further confirmed its stability.