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采用ＮｄＹＡＧ激光器对金刚石膜进行切割，研究了激光器在不同输出功率下切割金刚石膜的速率和切割深度与时间的关系，以及ＮｄＹＡＧ激光器切割的金刚石膜在成份和形状上的变化特点，给出了比较理想的切割工艺条件。
The diamond film was cut by NdYAG laser. The relationship between the cutting speed and the cutting depth of the diamond film under different output powers and the time, and the change of composition and shape of the diamond film cut by the NdYAG laser were studied. Ideal cutting conditions.