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利用多弧离子镀技术通过改变基体偏压(-100,-150,-200 V)在SKD11模具钢基体上制备了一系列ZrN涂层。采用X射线衍射、扫描电镜、纳米压痕仪、划痕仪、摩擦磨损试验机和台阶仪等分析技术对涂层的结构、表面形貌、硬度、弹性模量、断裂韧性、结合力、摩擦磨损性能等进行表征,重点研究基体偏压对涂层微观结构和力学性能的影响。结果表明,在不同偏压条件下制备的涂层始终由ZrN相构成;随着基体偏压的升高,ZrN涂层生长的择优取向发生了改变,生长择优取向从低偏压下(-100 V)的(311)向(111)(-200 V)转变;硬度和结合力呈现先增后减的趋势,并在偏压为-150 V时达到最大值,分别为29.14 GPa和58 N;摩擦系数及磨损量均在偏压为-150 V时最低。
A series of ZrN coatings were prepared on the SKD11 die steel by changing the substrate bias (-100, -150, -200 V) by multi-arc ion plating. The structure, surface morphology, hardness, elastic modulus, fracture toughness, bond strength and friction of the coatings were characterized by X-ray diffraction, scanning electron microscopy, nanoindentation, scratch tester, friction and wear tester, Wear performance and other characterization, focusing on the substrate bias on the microstructure and mechanical properties of the coating. The results show that the coatings prepared under different bias conditions are always composed of ZrN phase. With the increase of substrate bias, the preferred orientation of ZrN coatings changes. The preferred orientation of growth is from low bias (-100 (311) to (111) (- 200 V) from V (V) to (111) (-200 V). The hardness and binding tended to increase first and then decrease, and reached the maximum values of 29.14 GPa and 58 N at bias voltages of -150 V, The friction coefficient and wear amount are lowest at -150 V bias.