Rapidly quenching embrittlement (RQE) sometimes appears in Fe73.5Cu1Nb3Si13.5B9 nanocrystalline soft magnetic alloy (FINEMET) during production process. As a re-sult of RQE the ductility of the as-quenched ribbon drops seriously. The mechanism of RQE has been elucidated in the recent works of current authors. It was believed that RQE is due to the structural relaxation but not related to a-Fe(Si) crystallization. In this paper, the high resolution TEM (HRTEM) method and image digital processing were applied to analyze the HRTEM images of two FINEMET rapidly quenched ribbons with different thicknesses in detail. In the thinner ductile sample, the ordering domains with the size of about 3nm are observed. In the thicker RQE sample, the metastable nanocrystalline domains with the size of 18nm are observed along with the structural relaxation. These domains seem to have Fe3B-like metastable phase struc-ture on nanometer scale. The result indicates that the local atomic ordering regions extend when RQE induced Rapidly quenching embrittlement (RQE) sometimes appears in Fe73.5Cu1Nb3Si13.5B9 nanocrystalline soft magnetic alloy (FINEMET) during production process. As a re-sult of RQE the ductility of the as-quenched ribbon drops seriously. The mechanism of RQE has been elucidated In the recent works of current authors. It was believed that RQE is due to the structural relaxation but not related to a-Fe (Si) crystallization. In this paper, the high resolution TEM (HRTEM) method and image digital processing were applied to analyze the HRTEM images of two FINEMET rapidly quenched ribbons with different thicknesses in detail. In the thinner ductile sample, the ordering domains with the size of about 3 nm are observed. observed along with the structural relaxation. These domains seem to have Fe3B-like metastable phase strucure on nanometer scale. The result indicates that the local atomic ordering regions exte nd when RQE induced