在计算技术和光网络等信息技术高速发展的信息化、智能化时代,为应对数据中心和超级计算机对数据带宽的需求和能耗的限制,发展低能耗的新型微纳光电子集成器件,特别是与微电子工艺兼容的Si基微纳光电子集成器件,由此带动光互连技术应用于短距离的数据高速率、低能耗传 In the era of information and intelligence where information technology such as computing technology and optical network are rapidly developing, in order to cope with data bandwidth and super-computer requirements for data bandwidth and energy consumption, a new type of micro-nano optoelectronic integrated device with low energy consumption is developed, Microelectronics compatible Si-based micro-nano optoelectronic integrated devices, which led to the application of optical interconnection technology for short-range high-speed data, low energy consumption