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金刚石是具有特种功能的超硬材料,过去金刚石的来源,除极稀少的天然金刚石外,人工合成是另一来源。合成全刚石要通过苛刻的实验条件才能实现。由于所获得的是颗粒状金刚石,难于加工,而限制了其用途。近年来发展的等离子体技术,可以在低压下合成金刚石薄膜,有可能大大扩大其应用领域。合成薄膜的压力仅仅是过去的亿分之一到百万分之一,具有很大的优越性。本文探讨了金刚石薄膜的特性、制备及其应用前景。
Diamond is a super-hard material with special functions. Origin of past diamonds, except rarer natural diamond, artificial synthesis is another source. Synthetic all-round stone to pass harsh experimental conditions can be achieved. Due to the obtained granular diamond, which is difficult to process, and its use is limited. In recent years, the development of plasma technology, can be synthesized under low pressure diamond film, it is possible to greatly expand its application areas. Synthetic film pressure is only the last one millionth to one millionth, with great advantages. This paper explores the characteristics, preparation and application of diamond films.