Superionic conductor RbAg4I5 crystalline grainfilms were prepared by vacuum thermal evaporation on NaCl crystalline substrates. The surface morphology, microstructure and the electronic energy states of the films were examined by atomic force microscopy, transmission-electron microscopy, x-ray diffraction and x-ray photoelectron spectroscopy. The results show that the obtained RbAg4I5 layer has an epitaxial film of perfect crystalline structure, and the unit cell of crystalline grain RbAg4I5 films belongs to cubic crystal system. The principal x-ray diffraction peaks at d = 3.7447 and 1.8733A are related to the structure of teary compound RbAg4I5films.