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对于结晶状态好的ZnO薄膜,测量了其光致发光(PL)光谱,发射光谱中只发现了峰值波长约389nm的近紫外光.样品进行超声处理后,发射谱中不仅观察到近紫外峰,又观察到波长约508nm的绿光峰.绿光峰的强度比近紫外光的强度强得多,且近紫外峰红移.进一步的热处理使绿光峰大大增强.超声处理改变了ZnO薄膜的质量和结晶状态,使晶格中产生氧空位.处理过程中的热效应使得薄膜晶格振动加剧.当晶格振动加剧到一定程度,晶格中的氧脱离格点形成氧空位.510nm左右的绿色发光峰是ZnO晶体中的氧空位产生的.薄膜的温度越高,氧空位的浓度越大,绿光峰的强度越强.
For the ZnO thin films with good crystallinity, the PL spectra were measured and only the near-UV light with a peak wavelength of about 389 nm was found in the emission spectra.Non-UV peaks were observed in the emission spectra of the samples after ultrasonic treatment, And observed a green peak wavelength of about 508nm.Green light peak intensity is much stronger than the intensity of near-ultraviolet light, and near-UV peak redshift further heat treatment so that the green peak is greatly enhanced.Ultrasonic treatment of ZnO thin films Quality and crystal state, the oxygen vacancies in the lattice generated during the heat treatment makes the thin film lattice vibration intensified when the lattice vibration intensified to a certain extent, the lattice lattice of oxygen from the lattice to form oxygen vacancies around the green about 510nm The luminescence peak is generated by oxygen vacancies in the ZnO crystal.The higher the temperature of the film, the greater the concentration of oxygen vacancies and the stronger the intensity of the green peak.