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本文分析了各种力的尺寸效应及表面张力对悬臂梁式微型阀启动的影响，得到了阀的开启压力．分析了微型阀的静态和动态过流特性，分别得到了阀的静态压差－流量曲线；当阀片两侧的压差随时间变化时，阀片的启闭与压差的变化之间存在一定的相位差，有可能引起泄漏甚至反向流动．
This paper analyzes the size effect of various forces and surface tension on the start-up of the cantilever micro-valve to obtain the valve opening pressure. The static and dynamic overcurrent characteristics of the micro-valve are analyzed, and the static pressure-flow curve of the valve is obtained respectively. When the pressure difference between both sides of the valve changes with time, there is a difference between the opening and closing of the valve and the change of the pressure difference A certain phase difference may cause leakage or even reverse flow.