国防科技大学最新推出的大量程纳米级分辨率光栅位移传感器是国家发明专利 ,首次采用一根低线数的单光栅实现了大量程高分辨率位移测量 ,量程为 1 0 0 mm～ 5 0 0 mm。通过改进光路设计 ,获得高倍数 (十至二十倍 )光学细分。如果该位移传感器配以高倍数的电子细分技术 ,可以实 National University of Defense Technology recently introduced a large range of nanometer resolution grating displacement sensor is a national invention patent, for the first time using a single low-line single grating to achieve a large range of high-resolution displacement measurement, the range of 100 mm ~ 500 mm. By improving the optical design, get high multiples (ten to twenty times) optical subdivision. If the displacement sensor coupled with high-fold electronic subdivision technology, can be real