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为了满足透明导电薄膜轻便、可折叠、高分辨率及快速响应的需求,在AZO单层透明导电薄膜研究基础上,尝试在柔性PET衬底上制备AZO/Ag/AZO三层透明导电薄膜。先利用光学薄膜设计软件对膜系进行设计优化,再参照此优化值制备研究不同AZO、Ag层对AZO/Ag/AZO薄膜光电性能的影响。通过合理的实验设计与对比,发现在柔性PET衬底上制备的三层AZO薄膜与在硬质衬底上制备的薄膜光电性能相当,且当三层AZO/Ag/AZO薄膜中AZO层厚度在40~45nm,Ag层厚度8nm时,在可见光波段的透过率高达到92%,电阻率低至4.0×10~(-5)Ω·cm,透明导电薄膜的品质因子最高为12.6×10~(-2)Ω~(-1)。得到的AZO/Ag/AZO三层透明导电薄膜具有与常见的ITO薄膜相比拟的性能。
In order to meet the requirements of lightweight, foldable, high resolution and fast response of transparent conductive films, AZO / Ag / AZO three-layer transparent conductive films were prepared on flexible PET substrates based on the research of AZO single-layer transparent conductive films. The optical film design software was firstly used to design and optimize the film system. Then the optimal values were used to study the influence of different AZO and Ag layers on the photoelectric properties of AZO / Ag / AZO films. Through reasonable experimental design and comparison, it is found that the three-layer AZO films prepared on flexible PET substrate have the same photoelectric properties as the films prepared on hard substrates. When the AZO layer thickness in the three AZO / Ag / AZO films is 40 ~ 45nm, the thickness of Ag layer is 8nm, the transmittance in the visible light band reaches as high as 92% and the resistivity is as low as 4.0 × 10-5 Ω · cm. The highest quality factor of transparent conductive film is 12.6 × 10 ~ (-2) Ω ~ (-1). The resulting AZO / Ag / AZO three-layer transparent conductive film has the properties comparable to common ITO films.