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本文根据吸气剂吸气的三因素——蒸散吸气因素、表面吸附因素与扩散因素,研究并确定吸气剂吸气的数学模型,用以说明不同情况下的吸气规律:当扩散很快,或气体压力很低时,吸气处于表面吸附决定区;当扩散很慢,或压力很高时,吸气进入扩散决定区。从理论上分析了吸气剂激活与再生的机理;实验研究了锆铝吸气剂泵的多次再生的性能,结果表明,每经一次再生,抽速递减5％,吸气量递减17％。
In this paper, based on the three factors of getter inhalation - evaporative inspiratory factors, surface adsorption factors and diffusion factors, the mathematical model of getter inspiration is studied and determined to illustrate the inspiratory pattern in different situations: when the diffusion is very Fast, or gas pressure is very low, inhalation in the surface adsorption decision area; when the diffusion is slow, or high pressure, inhalation into the diffusion zone. The mechanism of getter activation and regeneration was theoretically analyzed. The performance of multiple regenerations of zirconium-aluminum getter pump was experimentally studied. The results showed that the pumping speed decreased 5% and the amount of aspiration decreased 17% .