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通过溶胶-凝胶工艺制得具有良好湿敏特性的LiCl/SiO2-Al2O3薄膜材料,利用XRD和AFM对这类薄膜进行了结构表征.结果表明,具有纳米分相结构的薄膜在全湿范围内阻抗值的变化>3个数量级,阻抗的对数值与相对湿度的关系具有较好的线性度,吸湿响应<30s,脱湿响应<60s.
LiCl / SiO2-Al2O3 thin films with good hygroscopic properties were prepared by sol-gel process. The films were characterized by XRD and AFM. The results show that the change of the impedance value in the whole wet range is> 3 orders of magnitude, the logarithm of the impedance has good linearity with the relative humidity, the hygroscopic response is less than 30s and the desiccation response is less than 60s .