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为了提高有源静电轴承系统对外部扰动与参数变化的抑制能力,分析了被控系统模型的非线性和不确定性,针对存在的不确定性设计了滑模控制器以提高系统的鲁棒性,并通过引入边界层来抑制非线性控制带来的抖动问题。对滑模控制系统的性能进行了测试,并与采用滞后-超前校正下的系统性能进行比较和分析。实验结果表明,在静电轴承系统中采用滑模控制方法,能够显著增强系统在中频和低频段的力扰动抑制能力,提高对系统参数变化的鲁棒性。
In order to improve the ability of the active electrostatic bearing system to restrain disturbance and parameter variation, the nonlinearity and uncertainty of the controlled system model were analyzed. The sliding mode controller was designed to improve the robustness of the system against the existing uncertainties , And introduced the boundary layer to suppress the jitter caused by nonlinear control. The performance of the sliding mode control system was tested and compared with the system performance using hysteresis-lead correction. The experimental results show that the sliding mode control method used in the electrostatic bearing system can significantly enhance the system’s ability of restraining the force disturbance in the middle and low frequency bands and improve the robustness of the system parameters.