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本文对自准直调节方法的成像规律和光栅侧向倾斜对测量结果的影响等问题，进行了半定量分析，给出了相关的调节依据和正确的调节步骤
In this paper, the semi-quantitative analysis of the imaging rule of the self-collimation method and the influence of the grating lateral tilt on the measurement results are given, and the relevant adjustment basis and the correct adjustment steps are given