用中国原子能科学研究院HI-13串列加速器提供的高品质的重离子束127I(或35Cl、58Ni、209Bi等)轰靶。用Q3D磁谱仪和气体焦面探测器系统探测从靶材料上弹性反冲的各种离子,从测到的能谱中得到材料中元素的高分辨的深度分布。该气体焦面探测器由一个ΔE-E电离室和2个正比计数器组 High-quality heavy ion beam 127I (or 35Cl, 58Ni, 209Bi, etc.) target provided by China Institute of Atomic Energy HI-13 tandem accelerator. Using the Q3D magnetic spectrometer and the gas focal plane detector system to detect the various ions recoil from the target elastic recoil from the measured energy spectrum to get the material of high resolution depth distribution. The gas focal plane detector consists of a ΔE-E ionization chamber and two proportional counters