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采用SEM对金刚石薄膜涂层硬质合金刀具的金刚石薄膜表面、背面及金刚石薄膜剥落后的硬质合金刀片表面的典型形貌进行了观察，并采用TEM对金刚石薄膜／硬质合金刀片横截面的微观组织进行了研究，还采用FT—Raman光谱法对金刚石薄膜表面及金刚石薄膜剥落后的硬质合金刀片表面的微观结构进行了表征．结果表明：经适当的化学侵蚀脱钻和等离子体刻蚀脱碳预处理后，金刚石薄膜涂层硬质合金刀具的界面通常存在薄的（数十um）石墨碳层；局部区域见到金刚石粒子直接生长在WC颗粒上,金刚石膜／基横截面的典型组织层次为：金刚石薄膜／薄的石墨碳层／细小的WC层／残留的脱碳层（η相＋W相）／原始的硬质合金基体．
The surface topography and back surface of the diamond film coated cemented carbide tool and the surface morphology of the cemented carbide blade after the diamond film peeled off were observed by SEM. The surface morphology of the diamond film / cemented carbide blade The microstructure was also studied. The microstructure of the surface of the diamond film and the cemented carbide insert after the diamond film was peeled off were also characterized by FT-Raman spectroscopy. The results show that there are usually thin (tens of um) graphite carbon layers in the interface of the diamond film coated cemented carbide tools after the appropriate chemical etching and plasma etching decarburization pretreatment. In the local area, the diamond particles Direct growth on the WC particles, the typical microstructure of the diamond film / base cross section is: diamond thin film / thin graphite carbon layer / fine WC layer / residual decarburization layer (η phase + W phase) / original cemented carbide Matrix.