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光束线由前端、Be窗、激光对准、曝光快门、镜箱、3个VAT气动阀、差分系统、单次曝光机及微机测量控制系统等组成.
Beam line from the front, Be window, laser alignment, exposure shutter, mirror box, 3 VAT pneumatic valve, differential system, single exposure and computer measurement control system and other components.