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激光干涉仪作为主标准器提供标准长度量值,在水准标尺的检测中是主流的常规方法。尤其检测高精度的因瓦条码水准标尺时,激光干涉仪的测长误差及与其他配套设备的组合所带入的综合误差对测量结果产生怎样的影响,文章就应用激光干涉仪检测水准标尺的过程中常见问题进行分析,从检测原理出发,探讨分析整套装置的综合误差。
The laser interferometer, which provides the standard length gauge as the master standard, is the dominant conventional method in the inspection of a level gauge. In particular, the detection of high-precision in-band bar code ruler, the laser interferometer length error and other equipment combined with the combination of errors brought about by the combination of measurement results how the impact of the article on the application of laser interferometer level ruler Common problems in the process of analysis, starting from the detection principle, analysis and analysis of the overall error of the device.