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本文针对硅压阻效应的各向异性,在压力传感器的硅杯设计中提出了“平均应力点等效模型”的基本设计思想,并以此模型为基础详细论述了高量程压力传感器硅杯的设计过程。
Aiming at the anisotropy of silicon piezoresistive effect, this paper presents the basic design idea of “average stress point equivalent model” in the silicon cup design of pressure sensor. Based on this model, the silicon cup of high-range pressure sensor designing process.