【摘 要】
：
A novel structure design of micro optic electro mechanical system (MOEMS) gyroscope is presented in this paper. The structure combining surface acoustic wave (S
【机 构】
：
School of Optoelectronics
【基金项目】
：
Postgraduate Science and Technology Innovation Fund of BIT
论文部分内容阅读
A novel structure design of micro optic electro mechanical system (MOEMS) gyroscope is presented in this paper. The structure combining surface acoustic wave (SAW) sensor, optical waveguide diffractive component, electro-optical modulator etc. is integrated on a LiNbO3 substrate as the gyroscope for sensing rotating angular velocity, and an optical readout device is added on the traditional SAW typed TE-TM mode converter as the detecting device. The principles of the MOEMS are discussed in the paper, and simulation result shows that there would be apparent advantages of higher precision and stronger anti-vibration capacity.
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