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采用真空蒸镀技术,在普通石英玻璃衬底上成功制备出固溶体ZnxM g1-xS多晶薄膜。用X射线能量色散谱仪、原子力显微镜、X射线衍射仪、紫外-可见分光光度计等对薄膜晶体成分、表面形貌、结构和光学性质做了分析。结果表明:当x=0.9时,固溶体ZnxM g1-xS晶体形貌生长和结晶性良好,为闪锌矿结构;由于镁成分的掺入,ZnxM g1-xS薄膜的(111)峰位相对于ZnS的(111)峰位向大角度方向移动0.14;°光学吸收边相对于ZnS产生了明显的蓝移,其禁带宽度增加0.19 eV,显示了作为短波光电器件材料和紫外探测材料的应用潜力。
The solid solution ZnxM g1-xS polycrystalline thin films were successfully prepared on common quartz glass substrates by vacuum deposition. The composition, surface morphology, structure and optical properties of thin films were analyzed by X-ray energy dispersive spectroscopy, atomic force microscopy, X-ray diffraction and UV-visible spectrophotometer. The results show that the crystal morphology of ZnxMg1-xS solid solution is well-crystallized and sphalerite structure is obtained when x = 0.9. Due to the incorporation of magnesium, the (111) peak position of ZnxMg1-xS thin film relative to that of ZnS (111) shift to 0.14 eV. The optical absorption edge has a significant blue shift relative to ZnS with an increase of 0.19 eV in forbidden band width, which shows its potential application as short wave optoelectronic device material and UV detection material.