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简化微电子器件的气密性检测程序,利用新的手段以简捷、准确的探定被检器件的漏速是每个检漏工作者所希望的。本文所介绍的两种工艺方法是国外在这方面的近期研究,可供参考。
To simplify the gas tightness testing procedures for microelectronic devices, it is desirable for each leak detector to utilize new means to easily and accurately detect the leak rate of the devices under test. The two kinds of technological methods introduced in this paper are the recent research abroad in this area for reference.