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介绍了一种圆柱形短气浮轴、大直径止推面的空气静压轴承结构,其径向回转精度为0.022μm,径向刚性为4kg/μ∥m,轴向刚性为20kg/μm。还介绍了该空气轴承采用的宝石轴承节流孔结构与止推面垂直度的组合测量方法。
A kind of aerostatic bearing structure with cylindrical short air floating shaft and large diameter thrust surface is introduced. Its radial rotation accuracy is 0.022μm, its radial rigidity is 4kg / μm and the axial rigidity is 20kg / μm. The combined measurement method of gem bearing orifice structure and thrust surface used in the air bearing is also introduced.