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本文概述了重掺锑硅单晶析出的规律现象,提出了析出的模型。根据这个模型,可以全面地解释观察到的规律性现象,并预计了未曾生长过的晶向[110]的重掺锑硅单晶析出的结构形态。介绍了防止析出的条件式。
This article summarizes the law of precipitation of heavy antimony-doped silicon single crystals and presents a model of precipitation. According to this model, the observed regularity can be fully explained and the structural morphology of heavy antimony-like silicon single crystals that have not been grown to [110] is predicted. Described the conditions to prevent precipitation.