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利用直流磁控溅射法,在室温水冷玻璃衬底上成功制备出了可见光透过率高、电阻率低的钛镓共掺杂氧化锌(TG-ZO)透明导电薄膜。X射线衍射和扫描电子显微镜研究结果表明,TGZO薄膜为六角纤锌矿结构的多晶薄膜,且具有c轴择优取向。研究了厚度对TGZO透明导电薄膜电学和光学性能的影响,结果表明厚度对薄膜的光电性能有重要影响。当薄膜厚度为628 nm时,薄膜具有最小电阻率2.01×10-4Ω.cm。所制备薄膜在波长为400~760 nm的可见光中平均透过率都超过了91%,TGZO薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极。
A transparent conductive film of titanium gallium co-doped zinc oxide (TG-ZO) with high visible light transmittance and low resistivity was successfully prepared by DC magnetron sputtering on a water-cooled glass substrate at room temperature. The results of X-ray diffraction and scanning electron microscopy show that the TGZO film is polycrystalline with hexagonal wurtzite structure and has the preferred c-axis orientation. The effects of thickness on the electrical and optical properties of TGZO transparent conductive films were investigated. The results show that the thickness has an important influence on the photoelectric properties of the films. When the film thickness is 628 nm, the film has the lowest resistivity of 2.01 × 10-4Ω.cm. The prepared films have an average transmittance of more than 91% in visible light with a wavelength of 400-760 nm. The TGZO films can be used as transparent electrodes for thin film solar cells and liquid crystal displays.