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根据单面分流四边形电极结构的正方形PSD的原理 ,测试并分析我们研制的 3mm×3mm正方形PSD的性能。给出反偏电压、光谱响应、暗电流、极间电容、极间阻抗、位置分辨率和位置线性特性等性能的测试结果。并在分析位置特性的非线性失真机理的基础上 ,给出位置特性非线性失真的修正方法。
According to the principle of the square PSD of the single-sided shunt quadrilateral electrode structure, the performance of the 3mm × 3mm square PSD we developed was tested and analyzed. The test results of performance such as bias voltage, spectral response, dark current, inter-electrode capacitance, inter-electrode impedance, position resolution and position linearity are given. On the basis of analyzing the nonlinear distortion mechanism of the position characteristic, a method of correcting the nonlinear distortion of the position characteristic is given.