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本文介绍了一种探测器可转动的新型多功能超声分子束设备,探测器的内外二室分别由两台离子泵进行抽气(高分辨率四极滤质器及离子-电子倍增器置于探测器的内室)。这内外二室各经不锈钢波纹管与离子泵相连接,因此,在离子泵位置固定的情况下,探测器可围绕碰撞中心转动120度。高压气体经喷口绝热膨胀及三级差分抽气而形成分子束,在喷管中氩气压强为600Torr时,分子束设备碰撞中心处的束流强度可达1.4×10~(17)个分子/厘米~2·秒,用可转动的探测器测得分子束发散角的半宽度约为2度。文中也给出了分子束由固体表面散射后的角分布曲线。最后,介绍了在激光诱导气固相反应中,反应速率将随入射氯分子平动能的增大而明显增加。
In this paper, a new type of multifunctional ultrasonic molecular beam device with detector rotation is introduced. The two chambers inside and outside the detector are respectively extracted by two ion pumps (high resolution quadrupole mass filter and ion-electron multiplier placed in Detector’s inner chamber). The inner and outer chambers are each connected to the ion pump via a stainless steel bellows so that the detector can be turned 120 degrees around the center of the collision with the ion pump in a fixed position. High-pressure gas through the nozzle adiabatic expansion and three differential pumping to form a molecular beam, argon pressure in the nozzle 600Torr, molecular beam equipment collision center beam intensity up to 1.4 × 10 ~ (17) molecules / Cm ~ 2 · sec, the half-width of the divergence angle of the molecular beam is about 2 degrees measured by a rotatable detector. The paper also gives the angular distribution of the molecular beam scattering from the solid surface. Finally, it is introduced that in the laser-induced gas-solid reaction, the reaction rate will increase obviously with the increase of the translational energy of the incident chlorine molecules.