本文介绍一种经过改进的气固两用高频离子源。这种离子源改变了旧源的附加磁场,高频耦合感应圈与引出电极之间的安排方向,采用了顶部薄壁的吸极的引出系统以及将管状固体蒸发器插入放电室中,已产生了硼磷等多种离子束,并提高了离子源的性能。 This article describes an improved gas-solid dual-purpose high-frequency ion source. This ion source alters the additional magnetic field of the old source, the arrangement direction of the high-frequency coupled induction coil and the extraction electrode, the extraction system with the top thin walled suction and the insertion of the tubular solid evaporator into the discharge chamber have been created Boron and phosphorus and other ion beams, and improve the performance of the ion source.