论文部分内容阅读
为提高柔性支承精密定位系统的行程,以传统直圆型柔性铰链为基本单元,提出一种新型大行程串联柔性机构.刚度与最大应力是影响大行程柔性机构性能的两个重要参数.采用伪刚体模型法,结合材料力学相关理论,建立了该柔性机构刚度和最大应力的理论模型.理论计算结果与非线性有限元分析结果相符,证明理论模型的正确性.在此基础之上,分析了大行程串联柔性机构的设计方法,验证了设计实例在大行程内的可靠性.脉冲响应测试实验结果表明由大行程串联柔性机构支承的精密定位系统定位误差不大于60 nm.
In order to improve the stroke of flexible support precision positioning system, a new type of large-stroke series flexible mechanism is proposed by using the traditional straight circular flexible hinge as the basic unit.Rigidity and maximum stress are two important parameters that affect the performance of large-stroke flexible mechanism.Using pseudo Rigid body model method and the theory of material mechanics, the theoretical model of the stiffness and the maximum stress of the flexible mechanism is established.The theoretical calculation results are in good agreement with the nonlinear finite element analysis results, which proves the correctness of the theoretical model.On this basis, The design of the flexible mechanism with large stroke in series verifies the reliability of the design example in the large stroke.The experimental results of impulse response test show that the positioning error of the precision positioning system supported by the large-stroke series flexible mechanism is not more than 60 nm.