论文部分内容阅读
本文提出一套炉温均匀性的计算方法,从中分析各种因素对均匀性的影响,并指出改善均匀性的措施。
In this paper, a method of calculating the uniformity of furnace temperature is presented. The influence of various factors on the uniformity is analyzed and the measures to improve the uniformity are also pointed out.