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电子信息产业是关系国家利益和安全的基础性和战略性产业。成为先进电子制造(AEM)强国是我国21世纪发展的战略目标,实现这一目标的关键是必须能自主地提供电子产业的AEM工艺、技术和装备。电子业的迅速发展,对制造装备的极限制造能力提出了严峻的挑战。其主要技术特点有:高运动精度(亚微米至纳米级定位精度)、高加速度(>15g)、高制造精度和高可靠性。提出面向下一代AEM新理论、新方法,造就一大批从事该领域的高科技人才,为我国AEM产业拥有自主产权的新工艺、新装备、实现跨越式发展提供技术基础是21世纪我国基础性研究面临的一项紧迫任务。本文论述了AEM领域的国内外现状、提出了该领域存在的重要科学问题和将要实施的计划措施。
Electronic information industry is a basic and strategic industry that is related to national interests and security. To become a powerful country in advanced electronic manufacturing (AEM) is the strategic goal of China’s 21st century development. The key to achieving this goal is to be able to provide the AEM technology, technology and equipment for the electronics industry autonomously. The rapid development of the electronics industry poses a severe challenge to the ultimate manufacturing capability of manufacturing equipment. Its main technical features are: high motion accuracy (sub-micron to nano-level positioning accuracy), high acceleration (> 15g), high manufacturing accuracy and high reliability. Put forward a new theory and method for the next generation of AEM, create a large number of high-tech talents engaged in this field, provide the technical basis for the new technology and new equipment with independent property rights in China’s AEM industry, and realize the leap-forward development in the 21st century. An urgent task facing us. This article discusses the current situation both at home and abroad in AEM field, puts forward important scientific problems in this field and plans and measures to be implemented.