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采用溶胶凝胶法(Sol Gel),在Si衬底上生长了TiO2纳米薄膜,并用此材料制备了光电导型的TiO2薄膜紫外光探测器.通过测量探测器的光电流与照射光波长的关系,可以看出,TiO2探测器在紫外波段230～280nm有很明显的光响应,光电流谱线近乎平坦;在280nm处光响应出现明显下降,且跨度较大,直至360nm又再次趋于平坦.测量了250nm波长处的响应度和外加偏压的关系,发现响应度随外加偏压的增加而增加,5V时达到饱和.
Sol-gel method was used to fabricate TiO2 thin film on Si substrate, and the photoconductive TiO2 thin film UV detector was prepared by using this material.By measuring the relationship between the detector photocurrent and the wavelength of irradiation light , It can be seen that the TiO2 detector has obvious photoresponse in the 230-280nm UV range and the photocurrent spectrum is almost flat. The photoresponse decreases sharply at 280nm and reaches a larger span until it is flattened again at 360nm. The relationship between responsivity and applied bias at 250nm was measured and it was found that the responsivity increased with the increase of applied bias and reached saturation at 5V.