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首先采用有限元分析法对自主设计的感应加热MOCVD反应室的电磁场分布进行了数值模拟,得到了反应室内磁场强度的分布和石墨基座焦耳热的分布.然后以石墨基座焦耳热分布作为温度模拟的载荷,基于热传导和热辐射模型,模拟得到了MOCVD反应室和石墨基座的温度分布.为了提高石墨基座表面温度分布的均匀性,通过将常规的石墨基座同心放置调整为偏心放置,有效地改善了温度分布均匀性,同时提高了感应加热的效率.
Firstly, the electromagnetic field distribution of the MOCVD reaction chamber independently designed by induction heating was numerically simulated by finite element analysis, and the distribution of the magnetic field strength in the reaction chamber and the Joule heat distribution of the graphite base were obtained.According to the Joule heat distribution of graphite base as the temperature The temperature distribution of the MOCVD reaction chamber and the graphite base was simulated based on the heat conduction and thermal radiation model.In order to improve the uniformity of the temperature distribution on the surface of the graphite base, the conventional graphite base was concentrically placed by placing it concentrically , Effectively improving the uniformity of temperature distribution, while improving the efficiency of induction heating.