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制备了一种基于MEMS工艺的定向天线。以异性材料为基底的亚波长谐振腔结构有效降低了天线体积。这种天线可以用于要求高能量密度的微系统的能量传送。本文中的天线厚度为1.5mm,可工作于10GHz频段。这使得其易于与微系统集成。文中也给出了仿真及实验的结果,并介绍了天线的加工过程。
A directional antenna based on MEMS technology was fabricated. The sub-wavelength resonant cavity structure based on the opposite-sex material effectively reduces the antenna volume. Such an antenna can be used for the energy transfer of microsystems requiring high energy density. The antenna thickness in this text is 1.5mm, can work in 10GHz frequency band. This makes it easy to integrate with microsystems. The article also gives the simulation and experimental results, and describes the antenna processing.