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本文先对光刻的概念和光刻工艺的基本流程进行了介绍,然后基于实际实验教学中的光刻实验,对目前教学实验条件和代课情况进行说明,通过对目前教学实验课程的总结,在后续章节中,提出了在目前条件和情况下,能够完善和丰富实验课程的想法,对现有教学模式的不足之处进行补充,进一步点出光刻实验的教学对于整个半导体器件工艺实验的重要性,同时也阐述了本人对实验课程的看法,认为实验课在本科生教学中,起着十分重要的作用。
This paper introduces the concept of photolithography and the basic process of photolithography process. Then based on the actual experimental teaching of photolithography experiment, the current teaching experimental conditions and substitutive conditions are described. Through the summary of the current teaching experiment course, In the following chapters, the author puts forward the idea of perfecting and enriching the experimental curriculum under the current conditions and circumstances, complements the shortcomings of the existing teaching mode, and further points out that the teaching of lithography is important to the process experiment of the entire semiconductor device At the same time, I also elaborated my own opinion on the experiment course, and I think the experiment course plays an important role in undergraduate teaching.