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本文在中国计量科学研究院研制的差拍法－ 珀干涉仪基础上，分析了其测量范围过小的本质原因，提出扩大差拍法－ 珀干涉仪测量范围的方法———换模锁定法，将激光频率依次锁定于法－ 珀腔的各个干涉级次，从而突破了激光器调谐范围的限制，拓深了该系统实现大范围纳米测量的能力。实验结果表明，在目前的实验条件下，换模锁定法的采用使该干涉仪的测量范围从原来的０１８ μｍ 左右扩大为１１ μｍ 。本文对实验结果进行了误差分析。
Based on the beat method - Perot interferometer developed by China Institute of Metrology, this paper analyzes the essential reasons why the measuring range is too small and proposes a method to enlarge the measuring range of the beat - , The laser frequency in order to lock in the law - Perot cavity interference levels, thus breaking the laser tuning range limitations, and deepen the system to achieve a wide range of nano-measurement capabilities. The experimental results show that under the current experimental conditions, the application of the mold-change locking method has expanded the measurement range of the interferometer from 018 μm to 11 μm. In this paper, error analysis of the experimental results.