论文部分内容阅读
采用AIBN引发剂,在C_6-C_(12)烷烃中研究了甲基异丙烯基酮(MIPK)的聚合反应规律,结果表明MIPK的聚合反应速率,随着烷烃分子中碳原子数的增加而增加,但对聚合物的无显著影响。测定了PMIPK及增敏后聚合体的UV光谱、热稳定性以及光降解前和用氢灯辐照40、160分钟后的IR谱图。表明除了聚合物主链断裂之外,还有由于降解而产生的单体。用含有不同增敏剂的PMIPK制成了可以与不同波长光源的光谱主峰相匹配的远紫外抗蚀剂。以增敏的PMIPK涂在镀铬玻璃基片上,通过软接触分辨率板作远紫外曝光、显影、化学蚀刻,得到0.4μ的清晰线条。
The polymerization of methyl isopropenyl ketone (MIPK) was studied in C 6 -C 12 alkane using AIBN initiator. The results showed that the polymerization rate of MIPK increased with the increase of the number of carbon atoms in the alkane molecule , But no significant effect on the polymer. The UV spectra, thermal stability, and IR spectra of PMIPK and sensitized polymer were measured before and 40,160 min after photodegradation. It shows that in addition to the polymer backbone breakage, there are also monomers due to degradation. The use of PMIPK with different sensitizers resulted in a far-UV resist that matched the main peak of the spectrum for light sources of different wavelengths. PMIPK sensitized coated on a chrome-plated glass substrate, through the soft touch resolution plate far UV exposure, development, chemical etching, get 0.4μ clear lines.