论文部分内容阅读
聚焦微离子束技术是一项有前途的超微细加工技术。聚焦光学系统的设计是该技术的关键之一。本文主要叙述和分析静电双透镜的离子光学特性,探讨采用静电双透镜的离子束聚焦系统的基本性能,在此基础上提出一种适用聚焦离子束装置的五极单电位静电聚焦系统。
Focusing on micro-ion beam technology is a promising ultra-micromachining technology. Focusing on the design of the optical system is one of the keys to this technology. This paper describes and analyzes the ion optics of the electrostatic double lens and discusses the basic performance of the ion beam focusing system using the electrostatic double lens. Based on this, a five-pole unipolar electrostatic focusing system is proposed.