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采用一种新的实验测量方案 ,将金属加热单元与温度探测单元合二为一 ,间接获得了在半导体和微电子学MEMS领域内有重要用途的SiNx 薄膜的导热系数、发射率、比热容和热扩散系数 ,并对实验结果进行了不确定度分析 ,为微电子电路设计和掩模成型工艺等提供了可靠的热物性数据 .实验结果表明 ,薄膜的导热系数、发射率、热扩散系数远比相应体材质低 ,而且还与温度、厚度有关 ,尺寸效应显著 ,而比热容则与体材质相差不大
Using a new experimental measurement scheme, the metal heating unit and the temperature detection unit are combined to obtain the indirect thermal conductivity, emissivity, specific heat capacity and heat of an SiNx film which has important applications in the field of semiconductor and microelectronics MEMS And the uncertainty of the experimental results were analyzed, which provided reliable thermophysical data for microelectronic circuit design and mask forming process.The experimental results show that the thermal conductivity, emissivity and thermal diffusivity of the film are far Corresponding body material is low, but also with the temperature, thickness, the size effect is significant, and the specific heat capacity is not much difference with the body material