论文部分内容阅读
为了提高镀膜的监控精度,并在大尺寸零件上得到均匀的膜厚,我们对DMD-450镀膜机钟罩内的工件架和比较片机构作了一些改进,实现了控制片(比较片)的转动并可更换,以及工件的自转。具体机械介绍如下。一、关于控制片机构的转动问题1.当采用拱形工件架时为实现控制片转动,并使转动工件架与控制片不相碰,采用如图1所示的拱形工件架。图中1是光源,2是聚光镜,3是控制片,4是反光镜,5是单色仪,6是光电倍增管,7是
In order to improve the monitoring accuracy of the coating and obtain a uniform film thickness on the large size parts, we made some improvements to the workpiece holder and the comparison piece mechanism in the DMD-450 coating machine bell cover, and realized the control sheet (comparison sheet) Rotating and replaceable, as well as workpiece rotation. Specific machinery introduced below. First, on the control sheet body rotation issues 1 when the use of arched workpiece holder to achieve control sheet rotation, and to rotate the workpiece holder and the control sheet do not touch, using the arch as shown in Figure 1 workpiece holder. 1 is a light source, 2 is a condenser lens, 3 is a control sheet, 4 is a mirror, 5 is a monochromator, 6 is a photomultiplier tube, and 7 is