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金属氧化物薄膜具有良好的光学、电学特性，因此是卫星表面热控材料防静电积累的重要材料之一．实验研究发现这些金属氧化物薄膜还具有优良的防原子氧和抗空间辐照环境的能力，而且这种能力与成膜方法及工艺过程直接相关．经模拟原子氧环境的氧等离子体作用后，溅射镀氧化锡样品的质损明显小于蒸镀氧化铟锡薄膜的质损，而氧化钢锡薄膜的质损又小于未镀薄膜试样质损．氧等离子体作用、电子辐照和紫外辐照后，ＴＯ薄膜样品的方阻和太阳吸收率的变化明显小于ＩＴＯ薄膜样品．最后经表面原子力显微镜分析表明不同制备的方法与工艺所获得的薄膜致密度有很大的差别，造成薄膜的稳定性明显不同．
The metal oxide film has good optical and electrical properties and is therefore one of the important materials for the anti-static accumulation of satellite surface thermal control materials. Experimental studies have found that these metal oxide films also have good anti-atomic oxygen and space irradiation environment capacity, and this ability and film-forming methods and processes are directly related. After oxygen plasma simulated by atomic oxygen environment, the mass loss of sputtered SnO2 coating was obviously less than that of evaporated ITO film, while the mass loss of SnO2 film was smaller than that of uncoated sample . The changes of square resistance and solar absorptance of TO films after oxygen plasma, electron irradiation and UV irradiation were significantly less than those of ITO films. Finally, AFM analysis shows that there is a great difference between the film densities obtained by different preparation methods and processes, resulting in significantly different film stability.