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在光纤共焦扫描显微镜（ＦＯＣＳＭ）的基础上，利用其轴向响应曲线的线性部分，给出了一种测定物体微位移的新方法．并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应，分辨率可以达到纳米量级．
Based on the optical confocal scanning microscope (FOCSM) and using the linear part of its axial response curve, a new method for measuring the micro-displacement of an object is given. And with this method, the tiny inverse piezoelectric stretching effect of piezoelectric ceramics is accurately measured, and the resolution can reach the order of nanometers.