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基于微机电系统(MEMS)技术,研制了一种新颖的光学腔与静电驱动器分离的Fabry-Pérot(F-P)可调谐滤波器。从光学设计、MEMS结构设计、制造工艺与器件测试等开展了F-P可调谐滤波器的研究,成功制备了工作在以1550 nm波长为中心、调谐范围为40 nm和驱动电压低于30 V的MEMS F-P可调滤波器。测试结果表明,其3 dB带宽为0.5 nm,单模光纤准直器封装的插入损耗低于8 dB,为研制实用的F-P可调滤波器奠定了良好的实验基础。
Based on the MEMS technology, a novel Fabry-Pérot (F-P) tunable filter with optical cavity and electrostatic actuator is developed. From the optical design, MEMS structure design, manufacturing process and device testing carried out FP tunable filter research, successfully prepared to work in the 1550 nm wavelength as the center, the tuning range of 40 nm and the driving voltage is lower than 30 V MEMS FP adjustable filter. The test results show that the 3 dB bandwidth of 0.5 nm, single mode fiber collimator package insertion loss of less than 8 dB, for the development of practical F-P tunable filter laid a good experimental foundation.