论文部分内容阅读
拟用于可见和红外区的三维光子晶体的制造,较其二维晶体困难得多。其制造技术包括常规光刻与全息光刻。已发展出各种方法以制造三维晶体,包括聚合物球的自装配和光刻图样层的堆叠。但是,用第一种方法制出的晶体头一个样品和下一个无法重复;第二种方法则要求逐层制作图样。
The fabrication of three-dimensional photonic crystals to be used in the visible and infrared regions is much more difficult than the two-dimensional crystals. The manufacturing techniques include conventional lithography and holographic lithography. Various methods have been developed to fabricate three-dimensional crystals, including self-assembly of polymer spheres and stacking of lithographic pattern layers. However, one sample of the crystal head produced in the first method and the next one can not be repeated; the second method requires layer-by-layer drawing.