众所周知,目前数十种检漏方法中,氦质谱检漏仪的灵敏度为较高。这种检漏仪在很多科技领域和生产部门,已经得到广泛的应用。三十多年来这种检漏仪结构形式大致相同,可称之为“常规型”氦质谱检漏仪。在后期有人围绕着要解决在高压强下检漏、无冷阱、无油三大课题开展工作。七十年代初国外对前两课题有所突破,出现了所谓逆扩散型氦质谱检漏 As we all know, the current dozens of leak detection methods, the helium mass spectrometer leak detector sensitivity is higher. This leak detector in many scientific and technological fields and production departments, has been widely used. Over the past 30 years, the structure of this leak detector is roughly the same, which can be referred to as the “conventional” helium mass spectrometer leak detector. In the latter part of people around to solve the leak under high pressure, no cold trap, oil-free three major tasks to carry out work. In the early seventies abroad, the first two subjects have made a breakthrough, there has been the so-called inverse diffusion helium mass spectrometry leak