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提出了一种利用三个CCD探测三路准直光束位置以实现被测物六自由度测量的方法。测量系统包括两部分:一个反射镜和通过连接杆连接的两个CCD为移动部分,固接在被测物上;固定部分的光源、光开关和三个光学准直器产生三路准直光束。其中两路分别投射到两个CCD上,第三路经移动部分的反射镜反射回并由第三个CCD探测。被测物发生六自由度变化时,移动部分同步变化,三个CCD探测的光斑位置也随之变化,通过特定算法可解算出被测物六自由度运动。构建了一个可以表征六自由度测量特性的四自由度测量系统。测量结果表明:在相应测量范围内,与双频激光干涉仪或光电自准直仪测量值相比,系统偏摆角最大差值为1.27″,滚转角最大偏差为1.03″,两个平动位移最大偏差均小于1μm。
A method of using three CCDs to detect the position of three collimated beams is proposed to realize six degrees of freedom measurement of the measured object. The measuring system consists of two parts: a mirror and two CCDs connected by a connecting rod are moving parts fixed on the measured object; the fixed part of the light source, the optical switch and the three optical collimators generate three collimated beams . Two of which are projected onto two CCDs respectively, the third is reflected by the moving part of the mirror and is detected by the third CCD. Six degrees of freedom changes in the measured object, the moving part of the simultaneous changes in the position of the spot detected by the three CCD also changes, through a specific algorithm can be calculated six degrees of freedom of the measured object movement. A four degree-of-freedom measurement system is constructed to characterize the six-DOF measurement. The measurement results show that the maximum deviation of the system yaw angle is 1.27 “and the maximum deviation of the roll angle is 1.03” compared with the measured value of the dual-frequency laser interferometer or the photoelectric autocollimator in the corresponding measurement range. The two translational motion The maximum displacement deviation are less than 1μm.