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在多功能离子束辅助沉积装置上采用交替溅射和冷却聚四氟乙烯靶材的方法制备了薄膜。由XPS的结果可知，所得薄膜主要由CF2结构组成；FT-IR的结果表明，所得薄膜由C-F的最强吸收峰和聚四氟乙烯的特征吸收峰构成。所得薄膜的这些结构特征与聚四氟乙烯的结构是一致的。试验结果表明，用这种离子束溅射沉积方法可以获得聚四氟乙烯薄膜。
Thin films were prepared using a multi-functional ion beam assisted deposition apparatus by alternately sputtering and cooling Teflon targets. The results of XPS shows that the obtained film mainly consists of CF2 structure. The FT-IR results show that the obtained film is composed of the strongest absorption peak of C-F and the characteristic absorption peak of polytetrafluoroethylene. These structural features of the resulting film are consistent with the structure of polytetrafluoroethylene. The experimental results show that polytetrafluoroethylene films can be obtained by this ion beam sputtering deposition method.