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研究了射频中和器的工作原理,并且设计了射频中和器结构,实现了射频中和器的稳定工作。实验结果表明:射频中和器能够稳定引出电子束,有效中和离子束;在射频中和器不启动时去除函数峰值去除率仅有6nm/min,射频中和器正常工作时去除函数峰值去除率达到了72.5nm/min;并且射频中和器的中和能力与空心阴极中和器相当。因此,射频中和器满足光学加工对中和能力的需求,具备应用于光学加工的能力。
The working principle of RF neutralizer is studied, and the structure of RF neutralizer is designed to realize the stable operation of RF neutralizer. The experimental results show that the RF neutralizer can lead the electron beam steadily and effectively neutralize the ion beam. When the RF neutralizer does not start, the peak removal efficiency of the removal function is only 6nm / min. The peak of the removal function is removed when the RF neutralizer operates normally The rate reached 72.5nm / min; and RF neutralizer and neutral hollow cathode neutralizer. As a result, RF neutralizers meet the needs of optical processing centering and capability, with the ability to be used in optical processing.